%0 Journal Article
%T Shaped beam technology for nano-imprint mask lithography
%A Hudek, Peter
%A Dauksher, William J.
%J Proceedings of SPIE
%V 5504
%N 1
%P 204-208
%@ 0277-786X
%D 2004-06-02
%I SPIE
%~ DeepDyve