%0 Journal Article
%T Shallow-Trench Isolation With Raised-Field-Oxide Structure
%A Chen, Coming
%A Chang, Chun-Yen
%A Chou, Jih-Wen
%A Lur, Water
%A Sun, Shih-Wei
%J Japanese Journal of Applied Physics
%V 39
%N 3R
%@ 0021-4922
%D 2000-03-01
%~ DeepDyve