%0 Journal Article
%T A thin film thermoelectric device fabricated by a self-aligned shadow mask method
%A Yang, Fanglong
%A Zheng, Shuqi
%A Wang, Hanfu
%A Chu, Weiguo
%A Dong, Yuhua
%J Journal of Micromechanics and Microengineering
%V 27
%N 5
%P 8
%@ 0960-1317
%D 2017-05-01
%~ DeepDyve