%0 Journal Article
%T Characterization of Silicon Nitride and Silicon Carbonitride Layers from 1,1,3,3,5,5‐Hexamethylcyclotrisilazane Plasmas
%A Brooks, T. A.
%A Hess, D. W.
%J Journal of the Electrochemical Society
%V 135
%N 12
%P 3086-3093
%@ 0013-4651
%D 1988-12-01
%~ DeepDyve