%0 Journal Article
%T Three dimensional EUV simulations: a new mask near field and imaging simulation system
%A Evanschitzky, Peter
%J Proceedings of SPIE
%V 5992
%N 1
%P 59925B-59925B-9
%@ 0277-786X
%D 2005-10-21
%I SPIE
%~ DeepDyve