%0 Journal Article
%T Experimental investigation of the electromagnetic effect and improvement of the plasma radial uniformity in a large-area, very-high frequency capacitive argon discharge
%A HAN, Daoman
%A SU, Zixuan
%A ZHAO, Kai
%A LIU, Yongxin
%A GAO, Fei
%A WANG, Younian
%J Plasma Science and Technology
%V 23
%N 5
%P 9
%@ 1009-0630
%D 2021-05-01
%I IOP Publishing
%~ DeepDyve