%0 Journal Article
%T Comparison of laser-induced damage morphology in three model thin-film systems: HfO 2 , Y 2 O 3 , and Ta 2 O 5
%A Papernov, Semyon
%J Proceedings of SPIE
%V 2428
%N 1
%P 385-396
%@ 0277-786X
%D 1995-07-14
%I SPIE
%~ DeepDyve