%0 Journal Article
%T Dependency of the Underlying Surface Condition on Dielectric Film Removal at Wafer Edge
%A Sato, Nobuyoshi
%A Shimogaki, Yukihiro
%J ECS Journal of Solid State Science and Technology
%V 3
%N 1
%@ 2162-8769
%D 2014-01-01
%~ DeepDyve