%0 Journal Article %T Investigation of Low Energy Electron Irradiated SiO2 Based MOS Devices by Capacitance-Voltage and Thermally Stimulated Current Techniques %A Aliasgari Renani, R. %A Soltanovich, O. A. %A Knyazev, M. A. %A Koveshnikov, S. V. %J Russian Microelectronics %V 52 %N Suppl 1 %P S274-S278 %@ 1063-7397 %D 2023-12-01 %I Pleiades Publishing %~ DeepDyve