%0 Journal Article
%T Fabrication of Pierce‐Type Nanocrystalline Si Electron‐Emitter Array for Massively Parallel Electron Beam Lithography
%A NISHINO, HITOSHI
%A YOSHIDA, SHINYA
%A KOJIMA, AKIRA
%A IKEGAMI, NOKATSU
%A TANAKA, SHUJI
%A KOSHIDA, NOBUYOSHI
%A ESASHI, MASAYOSHI
%J Electronics & Communications in Japan
%V 99
%N 5
%P 11-19
%@ 1942-9533
%D 2016-05-01
%I Wiley Subscription Services, Inc., A Wiley Company
%~ DeepDyve