%0 Journal Article %T Oxygen Plasma Treated Aluminum as a Gate Dielectric for AlGaN/GaN High Electron Mobility Transistors %A Selvaraj, S. Lawrence %A Egawa, Takashi %J Journal of the Electrochemical Society %V 156 %N 9 %P H690-H693 %@ 0013-4651 %D 2009-06-29 %~ DeepDyve