%0 Journal Article
%T Patterning approach for detecting defect in device manufacturing
%A Vikram, Abhishek
%A Agarwal, Vineeta
%J "Semiconductors"
%V 51
%N 12
%P 1661-1665
%@ 1063-7826
%D 2017-12-01
%I Pleiades Publishing
%~ DeepDyve