%0 Journal Article
%T Modeling and sensitivity analysis of a MEMS vibratory rotation rate sensor
%A Lajimi, S. A. M.
%A Abdel-Rahman, Eihab
%A Heppler, Glenn
%J Proceedings of SPIE
%V 9061
%P 90612I-90612I-11
%@ 0277-786X
%D 2014-03-08
%I SPIE
%~ DeepDyve