%0 Journal Article
%T Novel Pb(Ti, Zr)O3(PZT) Crystallization Technique Using Flash Lamp   for Ferroelectric RAM (FeRAM) Embedded LSIs   and One Transistor Type FeRAM Devices
%A Yamakawa, Koji
%A Imai, Keitaro
%A Arisumi, Osamu
%A Arikado, Tsunetoshi
%A Yoshioka, Masaki
%A Owada, Tatsushi
%A Okumura, Katsuya
%J Japanese Journal of Applied Physics
%V 41
%N 4S
%@ 0021-4922
%D 2002-04-01
%~ DeepDyve