%0 Journal Article
%T Deposition of silica thin films formed by sol–gel method
%A Guleryuz, Hasan
%A Kaus, Ingeborg
%A Filiàtre, Claudine
%A Grande, Tor
%A Einarsrud, Mari-Ann
%J Journal of Sol-Gel Science and Technology
%V 54
%N 2
%P 249-257
%@ 0928-0707
%D 2010-03-17
%I Springer US
%~ DeepDyve