%0 Journal Article
%T Research on femtosecond laser micro-hole machining technology of quartz glass
%A Yang, Kun
%A Cheng, Kaijie
%A Zhang, Wenwu
%A Wang, Ji
%A Wang, Guolong
%J Proceedings of SPIE
%V 13287
%P 132870K-132870K-11
%@ 0277-786X
%D 2024-10-11
%I SPIE
%~ DeepDyve