%0 Journal Article
%T Effects of cleaning on NIL templates: surface roughness, CD, and pattern integrity
%A Singh, Sherjang
%A Onuki, Kenji
%A Kawamata, Naoshi
%A Nagai, Takaharu
%A Kurihara, Masaaki
%A Tomita, Tatsuya
%A Hayashi, Naoya
%A Dress, Peter
%A Dietze, Uwe
%J Proceedings of SPIE
%V 8166
%N 1
%P 81662P-81662P-7
%@ 0277-786X
%D 2011-10-06
%I SPIE
%~ DeepDyve