%0 Journal Article
%T A Breakthrough Method for the Effective Conditioning of PVA Brush Used for Post-CMP Process
%A Lee, Jung-Hwan
%A Ryu, Heon-Yul
%A Hwang, Jun-Kil
%A Yerriboina, Nagendra Prasad
%A Kim, Tae-Gon
%A Hamada, Satomi
%A Wada, Yutaka
%A Hiyama, Hirokuni
%A Park, Jin-Goo
%J ECS Journal of Solid State Science and Technology
%V 8
%N 6
%@ 2162-8769
%D 2019-01-01
%~ DeepDyve