%0 Journal Article
%T Controllable Ultra Low-k by Via-Typed Air Gap with the Better Design Margin for Logic Devices below 45 nm Node
%A Youn-Ok, Choi
%A Sang-Yong, Kim
%J Chinese Physics Letters
%V 27
%N 9
%P 2
%@ 0256-307X
%D 2010-09-01
%~ DeepDyve