%0 Journal Article
%T High-Resolution Rotation-Measuring System for MEMS Ultrasonic Motors Using Tunneling Magnetoresistance Sensors
%A He, Jiangbo
%A Feng, Qiuyue
%A Chen, Yu
%A Yang, Tianyu
%A Li, Xiaoshi
%A Zhou, Wu
%J Micromachines
%V 15
%N 8
%@ 2072-666X
%D 2024-08-12
%I Multidisciplinary Digital Publishing Institute
%~ DeepDyve