%0 Journal Article
%T Reduction of White Spot Defects in CMOS Image Sensors Fabricated Using Epitaxial Silicon Wafer with Proximity Gettering Sinks by CH2P Molecular Ion Implantation
%A Kadono, Takeshi
%A Hirose, Ryo
%A Onaka-Masada, Ayumi
%A Kobayashi, Koji
%A Suzuki, Akihiro
%A Okuyama, Ryosuke
%A Koga, Yoshihiro
%A Fukuyama, Atsuhiko
%A Kurita, Kazunari
%J Sensors
%V 22
%N 21
%@ 1424-8220
%D 2022-10-28
%I Multidisciplinary Digital Publishing Institute
%~ DeepDyve