%0 Journal Article
%T Machine-learning-based error detection modeling and feature scoring for error cause analysis of CD-SEMs
%A Yoshida, Yasuhiro
%A Ishikawa, Masayoshi
%A Sasajima, Fumihiro
%A Ohkoshi, Shigeo
%A Takano, Masami
%J Proceedings of SPIE
%V 12496
%P 1249625-1249625-10
%@ 0277-786X
%D 2023-04-27
%I SPIE
%~ DeepDyve