%0 Journal Article
%T Fabrication of single/double crown-shaped capacitors on DRAM cell using phase-shift mask technology
%A Lin, John C.
%J Proceedings of SPIE
%V 2726
%N 1
%P 135-145
%@ 0277-786X
%D 1996-06-07
%I SPIE
%~ DeepDyve