%0 Journal Article
%T Enhancing Slurry Stability and Surface Flatness of Silicon Wafers through Organic Amine-Catalyzed Synthesis Silica Sol
%A Xing, Yi
%A Wang, Weilei
%A Liu, Weili
%A Song, Zhitang
%J Nanomaterials
%V 14
%N 16
%@ 2079-4991
%D 2024-08-22
%I Multidisciplinary Digital Publishing Institute
%~ DeepDyve