%0 Journal Article
%T Through-substrate coupling elements for silicon-photonics-based short-reach optical interconnects
%A Mangal, Nivesh
%A Missinne, Jeroen
%A Van Campenhout, Joris
%A Van Steenberge, Geert
%A Snyder, Bradley
%J Proceedings of SPIE
%V 10924
%P 109240D-109240D-12
%@ 0277-786X
%D 2019-03-04
%I SPIE
%~ DeepDyve