%0 Journal Article
%T Effects of Wet Cleaning on Si Contaminated with Heavy Metals during Reactive Ion Etching
%A Hosoya, Tetsuo
%A Ozaki, Yoshiharu
%A Hirata, Kazuo
%J Journal of the Electrochemical Society
%V 132
%N 10
%P 2436-2439
%@ 0013-4651
%D 1985-10-01
%~ DeepDyve