%0 Journal Article
%T Horizontally patterned Si nanowire growth for nanomechanical devices
%A Fernandez-Regulez, M
%A Sansa, M
%A Serra-Garcia, M
%A Gil-Santos, E
%A Tamayo, J
%A Perez-Murano, F
%A San Paulo, A
%J Nanotechnology
%V 24
%N 9
%P 7
%@ 0957-4484
%D 2013-03-08
%~ DeepDyve