%0 Journal Article
%T MEMS devices based on self-organizing semiconductors structures
%A Denisenko, Mark A.
%A Isaeva, Alina S.
%A Lysenko, Igor E.
%A Tkachenko, Alexey V.
%J Proceedings of SPIE
%V 12157
%P 121570K-121570K-6
%@ 0277-786X
%D 2022-01-30
%I SPIE
%~ DeepDyve