%0 Journal Article
%T Depth-correlated backscattered electron signal intensity for 3D-profile measurement of high aspect ratio holes
%A Sun,, Wei
%A Ohta,, Hiroya
%A Ninomiya,, Taku
%A Goto,, Yasunori
%A Sohta,, Yasunari
%J Microscopy
%V 68
%N 5
%@ 0022-0744
%D 2019-10-09
%I The Japanese Society of Microscopy
%~ DeepDyve