%0 Journal Article
%T P‐93: Highly Reliable Mobile Liquid Crystal Display using AIO x Deposited By Atomic Layer Deposition for Side Sealing Structure
%A Ishitani, Tetsuji
%A Kubota, Daisuke
%A Nakano, Masaru
%A Kubota, Yusuke
%A Moriya, Koji
%A Yamashita, Akio
%A Sakurada, Yujiro
%A Kusunoki, Koji
%A Shishido, Hideaki
%A Sugimoto, Kazuya
%A Hirakata, Yoshiharu
%A Yamazaki, Shunpei
%A Hayakawa, Masahiko
%J Sid Symposium Digest of Technical Papers
%V 46
%N 1
%P 1507-1510
%@ 0097-966X
%D 2015-06-01
%I Wiley Subscription Services, Inc., A Wiley Company
%~ DeepDyve