%0 Journal Article
%T Study of N-type Si delta doping on InP and In 0.53 Ga 0.47 As
%A Yan, J.
%J Proceedings of SPIE
%V 5260
%N 1
%P 442-445
%@ 0277-786X
%D 2003-12-12
%I SPIE
%~ DeepDyve