%0 Journal Article
%T A new method to measure the distance between the micro-device and the substrate
%A Kishimoto, Satoshi
%A Johnson, George C.
%J Proceedings of SPIE
%V 5852
%N 1
%P 724-728
%@ 0277-786X
%D 2005-04-12
%I SPIE
%~ DeepDyve