%0 Journal Article
%T Fabrication of piezoelectric thin film of zinc oxide in composite membrane of ultrasonic microsensors
%A Biowski, J.
%J Journal of Materials Science
%V 34
%N 19
%P 4661-4664
%@ 0022-2461
%D 2004-10-01
%I Kluwer Academic Publishers
%~ DeepDyve