%0 Journal Article
%T Evaluation of oxide chemical mechanical polishing performance of polystyrene coated ceria hybrid abrasives
%A Chen, Ailian
%A Zhang, Zefang
%A Li, Xiazhang
%A Chen, Yang
%J Journal of Materials Science: Materials in Electronics
%V 27
%N 3
%P 2919-2925
%@ 0957-4522
%D 2015-11-24
%I Springer US
%~ DeepDyve