%0 Journal Article
%T A Novel T-Shaped Shallow Trench Isolation Technology
%A Hong, Sug Hun
%A Ahn, Dong Ho
%A Park, Moon Han
%A Kang, Ho Kyu
%J Japanese Journal of Applied Physics
%V 40
%N 4S
%@ 0021-4922
%D 2001-04-01
%~ DeepDyve