%0 Journal Article
%T The fabrication of LIGA mask using photolithography and synchrotron radiation lithography
%A Yi, F.
%A Jin, M.
%A Tang, E.
%A Xian, D.
%J Microsystem Technologies
%V 3
%N 1
%P 7-9
%@ 0946-7076
%D 1996-11-22
%I Springer-Verlag
%~ DeepDyve