%0 Journal Article
%T Wafer back pressure control and optimization in the CMP process
%A Men, Yanwu
%A Zhang, Hui
%A Zhou, Kai
%A Ye, Peiqing
%J Journal of Semiconductors
%V 32
%N 12
%P 8
%@ 1674-4926
%D 2011-12-01
%~ DeepDyve