%0 Journal Article
%T Research and development of capacitive transducer with linear acceleration
%A Korobova, Natalia
%A Kochurina, Elena
%A Timoshenkov, Sergey
%A Chaplygin, Yuriy
%A Anchutin, Stepan
%A Kosolapov, Andrey
%J Proceedings of SPIE
%V 9517
%P 951725-951725-6
%@ 0277-786X
%D 2015-05-20
%I SPIE
%~ DeepDyve