%0 Journal Article %T High-power AlGaN deep-ultraviolet micro-light-emitting diode displays for maskless photolithography %A Feng, Feng %A Liu, Yibo %A Zhang, Ke %A Yang, Hang %A Hyun, Byung-Ryool %A Xu, Ke %A Kwok, Hoi-Sing %A Liu, Zhaojun %J Nature Photonics %V 19 %N 1 %P 101-108 %@ 1749-4885 %D 2025-01-01 %I Nature Publishing Group UK %~ DeepDyve