%0 Journal Article
%T Impacts of CF+, CF2+, CF3+, and Ar Ion Beam Bombardment with Energies of 100 and 400 eV on Surface Modification of Photoresist
%A Takeuchi, Takuya
%A Amasaki, Shinpei
%A Kondo, Hiroki
%A Ishikawa, Kenji
%A Toyoda, Hirotaka
%A Sekine, Makoto
%A Kang, Song-Yun
%A Sawada, Ikuo
%A Hori, Masaru
%J Japanese Journal of Applied Physics
%V 50
%N 8S1
%@ 0021-4922
%D 2011-08-01
%~ DeepDyve