%0 Journal Article %T A Numerical Study of an Ellipsoidal Nanoparticles under High Vacuum Using the DSMC Method %A Jang, Jinwoo %A Son, Youngwoo %A Lee, Sanghwan %J Micromachines %V 14 %N 4 %@ 2072-666X %D 2023-03-30 %I Multidisciplinary Digital Publishing Institute %~ DeepDyve