%0 Journal Article
%T Programmable two-dimensional microshutter arrays
%A Moseley, Jr., Samuel H.
%A Fettig, Rainer K.
%A Bowers, Charles W.
%A Orloff, Jon
%A Woodgate, Bruce E.
%J Proceedings of SPIE
%V 3878
%N 1
%P 392-397
%@ 0277-786X
%D 1999-09-02
%I SPIE
%~ DeepDyve