%0 Journal Article
%T Application of capillary forces and stiction for lateral displacement, alignment, suspension and locking of self-assembled microcantilevers
%A Rose, F
%A Hattori, M
%A Kobayashi, D
%A Toshiyoshi, H
%A Fujita, H
%A Kawakatsu, H
%J Journal of Micromechanics and Microengineering
%V 16
%N 10
%@ 0960-1317
%D 2006-10-01
%~ DeepDyve