%0 Journal Article
%T Comparison between mechanical method and chemical-assisted mechanical method for CVD diamond film polishing
%A Hsieh, Chun-Hao
%J Proceedings of SPIE
%V 4936
%N 1
%P 337-344
%@ 0277-786X
%D 2002-11-01
%I SPIE
%~ DeepDyve