%0 Journal Article
%T New method of 2-dimensional metrology using mask contouring
%A Matsuoka, Ryoichi
%A Toyoda, Yasutaka
%J Proceedings of SPIE
%V 7122
%N 1
%P 71222T-71222T-13
%@ 0277-786X
%D 2008-10-24
%I SPIE
%~ DeepDyve