%0 Journal Article
%T Extension of optical lithography by mask-litho integration with computational lithography
%A Takigawa, T.
%A Gronlund, K.
%J Proceedings of SPIE
%V 7748
%N 1
%P 77480R-77480R-11
%@ 0277-786X
%D 2010-05-24
%I SPIE
%~ DeepDyve