%0 Journal Article
%T Study of Metal Etching Using Ozone Water
%A Hatsuki, Ryuji
%A Yamamoto, Takatoki
%J Electrical Engineering in Japan
%V 193
%N 1
%P 65-72
%@ 0424-7760
%D 2015-10-01
%I Wiley Subscription Services, Inc., A Wiley Company
%~ DeepDyve