%0 Journal Article
%T Highly Sensitive, Flexible MEMS Based Pressure Sensor with Photoresist Insulation Layer
%A Liang, Binghao
%A Chen, Wenjun
%A He, Zhongfu
%A Yang, Rongliang
%A Lin, Zhiqiang
%A Du, Huiwei
%A Shang, Yuanyuan
%A Cao, Anyuan
%A Tang, Zikang
%A Gui, Xuchun
%J Small
%V 13
%N 44
%P n/a-n/a
%@ 1613-6810
%D 2017-01-01
%I Wiley Subscription Services, Inc., A Wiley Company
%~ DeepDyve