%0 Journal Article
%T A Silicon Containing Positive Photoresist (SIPR) for a Bilayer Resist System
%A Saotome, Y.
%A Gokan, H.
%A Saigo, K.
%A Suzuki, M.
%A Ohnishi, Y.
%J Journal of the Electrochemical Society
%V 132
%N 4
%P 909-913
%@ 0013-4651
%D 1985-04-01
%~ DeepDyve