%0 Journal Article
%T Development of focused microsized particle-beam technology and its application to microfabrication
%A Egashira, Mitsuru
%A Saito, Hidekazu
%J Proceedings of SPIE
%V 3673
%N 1
%P 141-147
%@ 0277-786X
%D 1999-07-20
%I SPIE
%~ DeepDyve